Oxygen Generators for Semiconductor Industry Waste Gas and Emissions Abatement

OGSI PSA generated oxygen can be a cost effective and safe source of O2 for abatement. Find out more about our Abatement Solutions for the Semiconductor and LED industries, or CONTACT US by filling out a brief form below. You can also call a live US-based sales representatives at 1-800-414-6474 during regular biz hours Eastern time.

Why OGSI’s PSA Oxygen Solutions for Emissions Abatement?

Safer and More Reliable

Careful Integration With Your Team

Saves Much More Money Over Time

Quick Return on Investment


American Made

Tailor-made Solutions


Tremendous Support and Service


Installed in Over 110 Countries


Industry Leader Since 1995

OGSI's Oxygen Generator with Cylinder Filling Plant CFP-50

OGSI has a number of Tailor-made Oxygen Generators and O2 Generating Systems for Emissions and Waste Gas Abatement in Various Sizes

OGSI Semiconductor Industry Waste Gas and Emissions Abatement Solutions
OGSI Oxygen Generator -1500 Rendering

OGSI Has a range of Oxygen Generators and Systems so that We Can Find the Right One For Your Application

The Pressure Swing Adsorption (PSA) Process

Talk WITH a US-BASED expert!


We can help you decide on the oxygen generator that is right for your facility and your application. Please fill out some quick basic information about yourself and how you use oxygen, and a representative will get right back to you.

Medical-grade Oxygen 24x7x365

Incredible Cost Savings

Perfect for filling cylinders or for constant free-flow oxygen needed by:

  • Firefighters
  • Ambulance teams
  • EMS professionals
  • Disaster preparedness teams
  • Hospitals
  • Veterinary clinics
  • Fish farms
  • Water treatment, and
  • Many many other medical and industrial applications.

“We’ve had the MOGS for about a year and it’s serving us well. It’s saving us money in filling our own bottles instead of going to a vender to have them refilled and brought in. It’s been a plus for us! It’s working out”

Frank Cassanite

Captain, Warwick Ambulance - Warwick, NY

“We were tired of having to deal with deliveries of oxygen. Now we’re more sustainable and can produce our own oxygen at any time, especially during natural disasters. It’s super super convenient. We just pull our ambulances in, fill our bottles up, and don’t have to worry about deliveries.”

B. Slagle

Paramedic Supervisor, South Lake EMS - Houston, TX


“These machines have been phenomenal for us. They keep our ambulances going with no downtime” – Troy Gibbs – New Castle EMS, Indiana


“The MOGS-100 Oxygen Generator has run almost flawlessly in our system. It is an extremely reliable unit and well worth the investment.” –Lynn Borders, Chief Officer, Kootenai County ID, EMS


“Of all the equipment purchases I have made, none have had a faster, more assured return on investment than my OGSI Oxygen Generator.” Reed Stevens, DVM – Ellicott Small Animal Hospital, Buffalo, NY